The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2021
Filed:
Mar. 11, 2019
Toshiba Memory Corporation, Minato-ku, JP;
Tomoko Fujiwara, Fujisawa, JP;
Takao Sueyama, Yokohama, JP;
Keiko Kaneda, Chiba, JP;
Michiko Tsumura, Shinagawa, JP;
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Abstract
A testing apparatus according to an embodiment includes a chamber, a probe card including probes exposed in the chamber, a stage supporting a test target object in the chamber, a moving mechanism to move the stage between a testing position where the test target object is in contact with the probes and a cleaning position where the test target object is arranged away from the probes in a horizontal direction, and an air tube introducing first dry air into the chamber through the probe card when the stage is placed at the cleaning position.