The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2021
Filed:
Oct. 23, 2019
Bruker Nano Gmbh, Berlin, DE;
Daniel Goran, Berlin, DE;
Waldemar Hahn, Berlin, DE;
Bruker Nano GmbH, Berlin, DE;
Abstract
The present invention refers to an apparatus () and a method for detecting characteristics of a probe. In an embodiment, the apparatus () comprises a vacuum chamber () and a beam generator () adapted to generate a beam of charged particles within the vacuum chamber (). When the beam of charged particles falls onto the probe, interaction particles and/or interaction radiation are generated. The apparatus () further comprises an electromechanical unit () within the vacuum chamber () and a detector () comprising a plurality of detection units and being arranged on the electromechanical unit () allowing for the detector () to move from a first position () with respect to the beam generator () to a second position () with respect to the beam generator () and vice versa, upon a corresponding actuation of the electromechanical unit () performable from outside of the vacuum chamber ().