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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11085126 B1

PDFFull Text
Date of Patent:
Aug. 10, 2021

Filed:

Nov. 13, 2019

Systems for selectively feeding chunk polysilicon or granular polysilicon in a crystal growth chamber

Applicant:

Globalwafers Co., Ltd., Hsinchu, TW;

Inventors:

Seok Min Yun, Cheonan-si, KR;

Seong Su Park, Cheonan-si, KR;

Jun Hwan Ji, Cheonan, KR;

Won-Jin Choi, Cheonan-si, KR;

UiSung Jung, Cheonan, KR;

Young Jung Lee, Cheonan-si, KR;

Tae Su Koo, Cheonan-si, KR;

Sung-Jin Kim, Yongin, KR;

Assignees:

GlobalWafers Co., Ltd., Hsinchu, TW;

Daevac International Co., Ltd., Gyeonggi-do, KR;

Attorney:

Armstrong Teasdale LLP

Primary Examiner:

Erin F Bergner

Int. Cl.
CPC ...
C30B 15/02 (2006.01); C30B 29/06 (2006.01); C30B 15/20 (2006.01); C30B 15/32 (2006.01); C30B 30/04 (2006.01); C30B 35/00 (2006.01); B64G 1/58 (2006.01); B64G 1/64 (2006.01); B66D 1/12 (2006.01); G01S 11/02 (2010.01); G01S 19/13 (2010.01); B64G 1/10 (2006.01); G01P 15/18 (2013.01);
U.S. Cl.
CPC ...
C30B 15/02 (2013.01); B64G 1/58 (2013.01); B64G 1/648 (2013.01); B66D 1/12 (2013.01); C30B 15/20 (2013.01); C30B 15/32 (2013.01); C30B 29/06 (2013.01); C30B 30/04 (2013.01); C30B 35/005 (2013.01); G01S 11/02 (2013.01); G01S 19/13 (2013.01); B64G 1/10 (2013.01); B64G 2001/1092 (2013.01); G01P 15/18 (2013.01);
Abstract

A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one of either the granular tray or the chunk tray. A valve mechanism and pulse vibrator are also disclosed.

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