The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2021
Filed:
Apr. 24, 2017
Applicant:
Cymer, Llc, San Diego, CA (US);
Inventors:
Yingbo Zhao, San Diego, CA (US);
Kevin O'Brien, San Diego, CA (US);
Assignee:
Cymer, LLC, San Diego, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S 3/10 (2006.01); H01S 3/09 (2006.01); H01S 3/131 (2006.01); G03F 7/20 (2006.01); H01S 3/13 (2006.01); H01S 3/104 (2006.01);
U.S. Cl.
CPC ...
H01S 3/10069 (2013.01); G03F 7/70025 (2013.01); G03F 7/70558 (2013.01); H01S 3/09 (2013.01); H01S 3/10038 (2013.01); H01S 3/131 (2013.01); H01S 3/104 (2013.01); H01S 3/10046 (2013.01); H01S 3/1306 (2013.01);
Abstract
A laser system's laser light energy control and resulting dose control is improved by creating and using a set of gain estimators, one for each of a set or range of laser light pulse repetition rates. When a new repetition rate is used, its corresponding gain estimator is retrieved, used to compute the voltage to fire the laser source, and updated. The resulting generated laser light thereby avoids the convergence delay inherent in prior laser systems and, further, can repeatedly do so with subsequent specified repetition rates.