The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 03, 2021

Filed:

Aug. 15, 2019
Applicant:

Yangtze Memory Technologies Co., Ltd., Wuhan, CN;

Inventors:

Wenyu Hua, Wuhan, CN;

Linchun Wu, Wuhan, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/24 (2006.01); G11C 11/16 (2006.01); H01L 27/06 (2006.01); H01L 27/11529 (2017.01); H01L 27/1157 (2017.01); H01L 27/11582 (2017.01);
U.S. Cl.
CPC ...
H01L 27/2481 (2013.01); G11C 11/1657 (2013.01); H01L 27/0688 (2013.01); H01L 27/1157 (2013.01); H01L 27/11529 (2013.01); H01L 27/11582 (2013.01);
Abstract

Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate and a memory stack including interleaved conductive layers and dielectric layers above the substrate. The 3D memory device also includes a slit structure extending vertically through the memory stack and extending laterally along a serpentine path to separate the memory stack into a first area and a second area. The 3D memory device further includes first channel structures each extending vertically through the first area of the memory stack and including a drain at its upper end, and second channel structures each extending vertically through the second area of the memory stack and including a source at its upper end. The 3D memory device further includes semiconductor connections disposed vertically between the substrate and the memory stack. Each semiconductor connection crosses the slit structure in a plan view to electrically connect a respective pair of first and second channel structures.


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