The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2021
Filed:
Sep. 05, 2018
Rigaku Corporation, Akishima, JP;
Naoki Matsushima, Tokyo, JP;
Kiyoshi Ogata, Tokyo, JP;
Kazuhiko Omote, Tokyo, JP;
Sei Yoshihara, Saitama, JP;
Yoshiyasu Ito, Tokyo, JP;
Hiroshi Motono, Tokyo, JP;
Hideaki Takahashi, Tokyo, JP;
Akifusa Higuchi, Tokyo, JP;
Shiro Umegaki, Tokyo, JP;
Shigematsu Asano, Tokyo, JP;
Ryotaro Yamaguchi, Saitama, JP;
Katsutaka Horada, Tokyo, JP;
RIGAKU CORPORATION, Tokyo, JP;
Abstract
An X-ray inspection device of the present invention includes a sample placement unitfor placing a sample as an inspection target therein, a sample placement unit positioning mechanismfor moving the sample placement unit, a goniometerincluding first and second rotation membersthat rotate independently of each other, an X-ray irradiation unitinstalled on the first rotation member, and a two-dimensional X-ray detectorinstalled on the second rotation member. The sample placement unit positioning mechanismincludes a χ rotation mechanismfor rotating the sample placement unitand a ϕ-axis about a χ-axis that is orthogonal to a θs-axis and a θd-axis at a measurement point P and extends horizontally.