The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2021
Filed:
Jan. 29, 2020
Ndc Technologies Inc., Dayton, OH (US);
Vahe Ghazikhanian, Glendale, CA (US);
Ahmad R. Shishegar, Woodland Hills, CA (US);
NDC Technologies Inc., Dayton, OH (US);
Abstract
Described are system and method embodiments for measuring a thickness of a material layer using electromagnetic radiation. In some embodiments, a system includes a radiation source configured to direct first radiation towards a first surface of a layer of material having a thickness between the first surface and a second surface opposite the first surface. The first radiation causes the material layer to emit secondary radiation. A filter is positioned between the material layer and a radiation detector and in the beam path of the second radiation in order to attenuate a portion of the second radiation associated with fluorescence of the material to emit third radiation. Then, the radiation detector is configured to detect the third radiation and a controller is configured to provide a measurement corresponding to the thickness of the material layer based on the detected third radiation.