The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2021
Filed:
Aug. 14, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Yogananda Sarode Vishwanath, Bangalore, IN;
Steven E. Babayan, Los Altos, CA (US);
Stephen Prouty, San Jose, CA (US);
Andreas Schmid, Meyriez, CH;
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01); H01L 21/677 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68707 (2013.01); C23C 16/4584 (2013.01); C23C 16/4585 (2013.01); H01J 37/32623 (2013.01); H01L 21/67748 (2013.01); H01L 21/6831 (2013.01); H01L 21/68721 (2013.01); H01L 21/68742 (2013.01);
Abstract
Aspects of the present disclosure generally relate to apparatuses and methods for edge ring replacement in processing chambers. In one aspect, a carrier for supporting an edge ring is disclosed. In other aspects, robot blades for supporting a carrier are disclosed. In another aspect, a support structure for supporting a carrier in a degassing chamber is disclosed. In another aspect, a method of transferring an edge ring on a carrier is disclosed.