The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 20, 2021

Filed:

Mar. 14, 2019
Applicants:

Ryoichi Saotome, Kanagawa, JP;

Naoyuki Ueda, Kanagawa, JP;

Yuichi Ando, Hyogo, JP;

Yuki Nakamura, Tokyo, JP;

Yukiko Abe, Kanagawa, JP;

Shinji Matsumoto, Kanagawa, JP;

Yuji Sone, Kanagawa, JP;

Sadanori Arae, Kanagawa, JP;

Minehide Kusayanagi, Kanagawa, JP;

Inventors:

Ryoichi Saotome, Kanagawa, JP;

Naoyuki Ueda, Kanagawa, JP;

Yuichi Ando, Hyogo, JP;

Yuki Nakamura, Tokyo, JP;

Yukiko Abe, Kanagawa, JP;

Shinji Matsumoto, Kanagawa, JP;

Yuji Sone, Kanagawa, JP;

Sadanori Arae, Kanagawa, JP;

Minehide Kusayanagi, Kanagawa, JP;

Assignee:

Ricoh Company, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/24 (2006.01); H01L 29/66 (2006.01); H01L 21/28 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 29/24 (2013.01); H01L 21/02192 (2013.01); H01L 21/02194 (2013.01); H01L 21/02565 (2013.01); H01L 21/02628 (2013.01); H01L 21/28167 (2013.01); H01L 29/66765 (2013.01); H01L 29/66969 (2013.01); H01L 29/7869 (2013.01);
Abstract

A coating liquid for forming an oxide, the coating liquid including: A element, which is at least one alkaline earth metal; and B element, which is at least one selected from the group consisting of gallium (Ga), scandium (Sc), yttrium (Y), and lanthanoid, wherein when a total of concentrations of the A element is denoted by Cmg/L and a total of concentrations of the B element is denoted by Cmg/L, a total of concentrations of sodium (Na) and potassium (K) in the coating liquid is (C+C)/10mg/L or less and a total of concentrations of chromium (Cr), manganese (Mn), iron (Fe), cobalt (Co), nickel (Ni), and copper (Cu) in the coating liquid is (C+C)/10mg/L or less.


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