The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 20, 2021

Filed:

Nov. 26, 2019
Applicants:

Toyota Motor Engineering & Manufacturing North America, Inc., Plano, TX (US);

The Board of Trustees of the University of Illinois, Champaign, IL (US);

Inventors:

Shailesh N. Joshi, Ann Arbor, MI (US);

Paul Braun, Champaign, IL (US);

Julia Kohanek, Champaign, IL (US);

Gaurav Singhal, Maharashtra, IN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/373 (2006.01); C23C 28/02 (2006.01); C25D 5/02 (2006.01); H01L 21/48 (2006.01); B81C 1/00 (2006.01); C25D 5/48 (2006.01);
U.S. Cl.
CPC ...
H01L 23/3733 (2013.01); B81C 1/00031 (2013.01); C23C 28/027 (2013.01); C23C 28/028 (2013.01); C25D 5/02 (2013.01); C25D 5/48 (2013.01); H01L 21/4882 (2013.01); H01L 2221/68381 (2013.01);
Abstract

A method of forming an inverse opal structure along a substrate that includes depositing polymer spheres along the substrate and electroplating the substrate and spheres at a first current density to form a first solid metal layer such that the spheres are raised from the substrate. The method includes electroplating the substrate and the spheres at a second current density to diffuse metals from the substrate and deposit the metal about the spheres. The second current density is greater than the first current density. The method includes electroplating the substrate and spheres to form a second solid metal layer disposed over the spheres, and removing the spheres to form the inverse opal structure disposed between the first and second solid metal layers. The first and second solid metal layers define planar interface surfaces disposed over a porous structure of the inverse opal structure.


Find Patent Forward Citations

Loading…