The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2021
Filed:
Dec. 27, 2016
Hitachi High-tech Corporation, Tokyo, JP;
Tomonori Nakano, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
In order to provide an aberration corrector with a wide aberration correction range, easy control, highly accurate aberration correction, and a low cost, an aberration corrector, passing an electron beam through a central axis, includes a first current line group (to) which is arranged parallel to an optical axis at a position separated by Rfrom the central axis, and excites a first multipole field, and a second current line group (to) which is arranged parallel to the optical axis at a position separated by Rfrom the central axis, and independently excites a second multipole field having an order and intensity different from those of the first multipole field.