The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2021
Filed:
Nov. 29, 2017
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Scott Anderson Middlebrooks, Duizel, NL;
Adrianus Cornelis Matheus Koopman, Hilversum, NL;
Markus Gerardus Martinus Maria Van Kraaij, Eindhoven, NL;
Maxim Pisarenco, Son en Breugel, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G03F 7/20 (2006.01); G06T 7/143 (2017.01); G06T 7/149 (2017.01); G06T 7/00 (2017.01);
U.S. Cl.
CPC ...
G03F 7/705 (2013.01); G03F 7/70525 (2013.01); G06T 7/0004 (2013.01); G06T 7/143 (2017.01); G06T 7/149 (2017.01);
Abstract
A method including: obtaining a logistic mathematical model predicting the formation of a physical structure created using a patterning process; evaluating the logistic mathematical model to predict formation of a part of the physical structure and generate an output; and adapting, based on the output, an aspect of the patterning process.