The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2021
Filed:
Dec. 19, 2018
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Abstract
A resist composition containing a polymer compound which has a constitutional unit (a0) represented by Formula (a0-1); and an acid generator which is formed of a compound represented by Formula (b1) (in the formulae, Rarepresents an acid dissociable group represented by Formula (a0-r1-1); Ra, Ra, Ra, Ra, and Rarepresent a hydrocarbon group; Yarepresents a quaternary carbon atom; Rrepresents a hydrocarbon group which has a steroid skeleton containing at least one hydroxyl group; Yrepresents a divalent linking group having a single bond or a hetero atom; Vrepresents a single bond, an alkylene group, or a fluorinated alkylene group; and Rrepresents a hydrogen atom, a fluorine atom, or a fluorinated alkyl group).