The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 20, 2021

Filed:

Oct. 11, 2018
Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Yuji Hadano, Tokyo, JP;

Masatoshi Nayuki, Tokyo, JP;

Keiji Nomaru, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/142 (2014.01); B23K 26/06 (2014.01); H01L 21/67 (2006.01); B23K 26/53 (2014.01); B23K 26/146 (2014.01);
U.S. Cl.
CPC ...
B23K 26/142 (2015.10); B23K 26/0648 (2013.01); B23K 26/0665 (2013.01); B23K 26/146 (2015.10); B23K 26/53 (2015.10); H01L 21/67051 (2013.01); H01L 21/67092 (2013.01);
Abstract

A laser beam applying unit of a laser processing apparatus includes a laser oscillator, a condenser adapted to focus the laser beam emitted from the laser oscillator and apply the laser beam to a workpiece, and a liquid jetting apparatus disposed at a lower end portion of the condenser and adapted to jet a liquid to an upper surface of the workpiece. The liquid jetting apparatus includes: a transparent plate disposed at the lower end portion of the condenser and permitting transmission therethrough of the laser beam; a casing provided with a space defined by a ceiling wall composed of the transparent plate, side walls, and a bottom wall; an opening formed in the bottom plate, extending in a processing feeding direction, and permitting passage therethrough of the laser beam focused by the condenser; and a liquid supply section adapted to supply the liquid to the casing.


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