The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2021
Filed:
Dec. 17, 2018
Singulus Technologies Ag, Fuerstenfeldbruck, DE;
Jens Eckstein, Dachau, DE;
Peter Reustle, Walheim, DE;
Mathias Hohlmayer, Diessen am Ammersee, DE;
Uemit Seyhan, Singen, DE;
Benjamin Mandlmeier, Poecking, DE;
Michael Reising, Moembris, DE;
Stefan Kempf, Alzenau, DE;
Jan-Christof Jacobi, Dautphetal-Holzhausen, DE;
SINGULUS TECHNOLOGIES AG, Fuerstenfeldbruck, DE;
Abstract
A device for treating substrates by a treating liquid has at least one rotatably supported support roller which a substrate to be treated rests on during operation. The support roller has a hollow cylinder having a porous rigid material which the substrate to be treated rests on during operation. The device is configured to deliver, during operation, treating liquid via the interior of the hollow cylinder of the at least one support roller through the porous rigid material to the external surface of the hollow cylinder in order to treat at least one surface of the substrate by the treating liquid. The device is configured to treat several substrates in the form of plate-shaped separate wafers arranged one behind the other and/or next to one another in the device, by the treating liquid and to transport the substrates in a transport plane during the treatment.