The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2021
Filed:
Mar. 21, 2019
Applicants:
Tohoku University, Miyagi, JP;
Toray Research Center, Inc., Toyko, JP;
Inventors:
Masaaki Niwa, Miyagi, JP;
Tetsuo Endoh, Miyagi, JP;
Shoji Ikeda, Miyagi, JP;
Kosuke Kimura, Shiga, JP;
Assignee:
TOHOKU UNIVERSITY, Miyagi, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); G01N 23/20091 (2018.01); H01J 37/28 (2006.01); H01L 27/22 (2006.01); H01L 43/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G01N 23/20091 (2013.01); H01J 37/28 (2013.01); H01J 2237/221 (2013.01); H01J 2237/24485 (2013.01); H01J 2237/2802 (2013.01); H01L 27/222 (2013.01); H01L 43/02 (2013.01);
Abstract
An evaluation method for an electronic device provided with an insulating film between a pair of electrode layers includes preparing a sample that has a tunnel barrier insulating film as the insulating film; irradiating the sample with electron beams from a plurality of angles to acquire a plurality of images; and performing image processing using the plurality of images to reconstruct a stereoscopic image and generate a cross-sectional image of the sample from the stereoscopic image.