The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2021
Filed:
Dec. 11, 2019
Nuflare Technology, Inc., Yokohama, JP;
Masaya Takeda, Yokohama, JP;
Eiji Matsumoto, Yokohama, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
An inspection apparatus according to an embodiment includes: an optical image acquisition circuitry virtually dividing a sample into strip-shaped stripes, and acquiring an optical image; a reference image generation circuitry generating a reference image corresponding to the optical image; a comparison circuitry comparing the optical image and the reference image; a shift amount determination circuitry determining a shift amount between the optical image and the reference image, and generating an evaluation value; and an offset value calculation circuitry determining usage of the shift amount, and calculating an offset value for adjusting an acquisition position of the optical image. In a case where the offset value is calculated, the optical image acquisition circuitry acquires the optical image based on the offset value.