The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 13, 2021

Filed:

Nov. 25, 2019
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Yu-Jung Chang, Zhubei, TW;

Chin-Chang Hsu, Banqiao, TW;

Hsien-Hsin Sean Lee, Duluth, GA (US);

Wen-Ju Yang, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/118 (2006.01); H01L 21/8234 (2006.01); H01L 29/49 (2006.01); H01L 27/088 (2006.01); H01L 21/28 (2006.01); H01L 27/02 (2006.01); G06F 30/392 (2020.01); H01L 29/40 (2006.01);
U.S. Cl.
CPC ...
G06F 30/392 (2020.01); H01L 21/28008 (2013.01); H01L 21/823431 (2013.01); H01L 21/823437 (2013.01); H01L 27/0886 (2013.01); H01L 27/11807 (2013.01); H01L 29/401 (2013.01); H01L 29/4916 (2013.01); H01L 27/0207 (2013.01); H01L 27/088 (2013.01);
Abstract

A method of manufacturing an integrated circuit includes generating a layout design of the integrated circuit, manufacturing the integrated circuit based on the layout design, and removing a portion of a gate structure of a set of gate structures thereby forming a first and a second gate structure. Generating the layout design includes placing a set of gate layout patterns and a cut feature layout pattern on the first layout level. The cut feature layout pattern extends in a first direction, overlaps the set of gate layout patterns and identifies a location of the portion of the gate structure of the set of gate structures. The set of gate layout patterns correspond to fabricating a set of gate structures. The set of gate layout patterns extending in a second direction and overlapping a set of gridlines that extend in the second direction.


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