The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2021
Filed:
Dec. 28, 2017
Applicant:
Jgc Catalysts and Chemicals Ltd., Kanagawa, JP;
Inventors:
Michio Komatsu, Fukuoka, JP;
Yukihiro Iwasaki, Fukuoka, JP;
Hiroyasu Nishida, Fukuoka, JP;
Yuji Tawarazako, Fukuoka, JP;
Kazuhiro Nakayama, Fukuoka, JP;
Assignee:
JGC CATALYSTS AND CHEMICALS LTD., Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/321 (2006.01); H01L 21/3105 (2006.01); H01L 21/306 (2006.01); H01L 21/304 (2006.01); H01L 21/302 (2006.01); H01L 21/02 (2006.01); C09K 3/14 (2006.01); C09G 1/02 (2006.01); C09G 1/00 (2006.01); C08B 15/04 (2006.01); C01F 17/235 (2020.01); C01B 33/18 (2006.01); B24B 37/04 (2012.01); B24B 37/00 (2012.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); B24B 37/044 (2013.01); C09G 1/00 (2013.01); C09K 3/14 (2013.01); C09K 3/1454 (2013.01); C09K 3/1463 (2013.01); H01L 21/02013 (2013.01); H01L 21/302 (2013.01); H01L 21/304 (2013.01); H01L 21/30625 (2013.01); H01L 21/31051 (2013.01); H01L 21/31053 (2013.01); H01L 21/3212 (2013.01); C08B 15/04 (2013.01);
Abstract
A polishing composition comprising an abrasive grain; a modified microfibril cellulose in which at least a part of the cellulose units has a hydroxyl group at the C6 position oxidized to a carboxyl group; and a dispersion medium, wherein each content of Na and K is 100 ppm or less relative to the solids weight.