The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2021
Filed:
Sep. 12, 2019
Sumitomo Electric Device Innovations, Inc., Kanagawa, JP;
Keita Matsuda, Yokohama, JP;
SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC., Kanagawa, JP;
Abstract
A semiconductor device manufacturing method includes forming an organic insulating layer on a semiconductor on which metal wiring is provided, the organic insulating layer having an opening to expose part of the metal wiring, forming a seed metal covering the part of the metal wiring exposed from the opening, and an inside face and an around portion of the opening of the organic insulating layer, forming a mask covering an edge of the seed metal and exposing part of the seed metal formed in the opening, and forming a barrier metal on the seed metal exposed from the mask by electroless plating. The mask includes an organic material or an inorganic dielectric material.