The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 06, 2021

Filed:

Jun. 27, 2017
Applicant:

Hamamatsu Photonics K.k., Hamamatsu, JP;

Inventors:

Toshimitsu Kawai, Hamamatsu, JP;

Katsumi Shibayama, Hamamatsu, JP;

Takashi Kasahara, Hamamatsu, JP;

Masaki Hirose, Hamamatsu, JP;

Hiroki Oyama, Hamamatsu, JP;

Yumi Teramachi, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K, Hamamatsu, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/28 (2006.01); G02B 26/00 (2006.01); G01J 5/08 (2006.01); G01J 5/06 (2006.01); G01J 1/04 (2006.01); G01J 5/02 (2006.01); G01J 5/04 (2006.01);
U.S. Cl.
CPC ...
G02B 5/285 (2013.01); G01J 1/0488 (2013.01); G01J 5/023 (2013.01); G01J 5/024 (2013.01); G01J 5/0235 (2013.01); G01J 5/041 (2013.01); G01J 5/045 (2013.01); G01J 5/06 (2013.01); G01J 5/0862 (2013.01); G02B 5/288 (2013.01); G02B 26/001 (2013.01);
Abstract

A Fabry-Perot interference filter includes: a substrate having a first surface and a second surface facing each other; a first layer structure disposed on the first surface; and a second layer structure disposed on the second surface, wherein the first layer structure is provided with a first mirror portion and a second mirror portion facing each other with an air gap therebetween, and a distance between the first mirror portion and the second mirror portion is varied, and the second layer structure is formed with a separation region separating at least a part of the second layer structure into one side and another side in a direction along the second surface.


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