The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2021
Filed:
Dec. 21, 2018
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Matthew Schlotterbeck, Atascadero, CA (US);
Daimhin Paul Murphy, San Diego, CA (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/26 (2006.01); B01D 53/02 (2006.01); B01D 53/86 (2006.01);
U.S. Cl.
CPC ...
B01D 53/261 (2013.01); B01D 53/02 (2013.01); B01D 53/8668 (2013.01); B01D 2253/102 (2013.01); B01D 2257/504 (2013.01); B01D 2257/80 (2013.01);
Abstract
Described are bulk process gas purification systems and related methods, including systems that are adapted to use a volume of gas at an exterior surface of a vessel, e.g., a flow of the gas, to control a temperature of the vessel interior during a recharging step, during a cooling step that follows a recharging step, or both.