Gate-all-around gradient-doped nano-sheet complementary inverter and method of making the same

Abstract

The present invention provides a gate-all-around quantum gradient-doped nano-sheet complementary inverter may comprise a P-type field effect transistor (FET) and an N-type FET. The P-type FET may comprise a P-type semiconductor nano-sheet channel, a first gate dielectric layer fully surrounding the P-type semiconductor nano-sheet channel, a first gate layer, and a source and a gate area, arranged at two ends of the channel. The N-type FET may comprise an N-type semiconductor nano-sheet channel, a second gate dielectric layer fully surrounding the N-type semiconductor nano-sheet channel, a second gate layer, and a source and a gate area, arranged at two ends of the channel. A common gate electrode may be arranged to fully surround the first and second gate layers. The doping concentration of the P-type and N-type semiconductor nano-sheet channels, which are arranged laterally, side by side, may be in gradient descent from the surface to the center. The width of the P-type semiconductor nano-sheet channel may be greater than that of the N-type semiconductor nano-sheet channel. The structure of the disclosed device may be dense enough to increase the density and improve the performance and simple enough to produce.