The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2021
Filed:
Sep. 27, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Erica Chen, Cupertino, CA (US);
Chentsau Chris Ying, Cupertino, CA (US);
Bhargav S. Citla, Fremont, CA (US);
Jethro Tannos, San Jose, CA (US);
Matthew August Mattson, Sunnyvale, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/322 (2006.01); H01L 21/425 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3221 (2013.01); H01L 21/02252 (2013.01); H01L 21/02274 (2013.01); H01L 21/425 (2013.01);
Abstract
A method of converting films is disclosed. A method of modifying films is also disclosed. Some methods advantageously convert films from a first elemental composition to a second elemental composition. Some methods advantageously modify film properties without modifying film composition.