The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2021
Filed:
May. 15, 2019
Applicant:
Nanya Technology Corporation, New Taipei, TW;
Inventor:
Chin-Te Kuo, New Taipei, TW;
Assignee:
NANYA TECHNOLOGY CORPORATION, New Taipei, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/8234 (2006.01); H01L 27/088 (2006.01); H01L 21/3065 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0223 (2013.01); H01L 21/3065 (2013.01); H01L 21/823431 (2013.01); H01L 21/823481 (2013.01); H01L 27/0886 (2013.01);
Abstract
A method for manufacturing a semiconductor structure is provided. The method includes the following steps. A fin structure having a base and a plurality of fin portions extending away from the base is provided. A portion of the fin structure in a first region is removed to form a first trench in the base and a first bump formed in the first trench. A first oxide layer is formed in the first region. The first oxide layer is removed.