The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2021
Filed:
Sep. 27, 2019
Nuflare Technology, Inc., Yokohama, JP;
Michihiro Kawaguchi, Mishima, JP;
Kiminobu Akeno, Yokohama, JP;
Keita Ideno, Yokosuka, JP;
Kota Iwasaki, Atsugi, JP;
Keisuke Goto, Kamakura, JP;
Kiyoshi Nakaso, Sunto-gun, JP;
Shintaro Yamamoto, Fujisawa, JP;
Hitoshi Matsushita, Inzai, JP;
Ryota Inoue, Inzai, JP;
Yuki Fukuda, Inzai, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
A charged particle beam irradiation apparatus according to an embodiment includes: an optical column; a stage; a mount supporting the stage; a chamber provided on the mount and supporting the optical column; a detector configured to detect movement of the stage; actuator units each including a curved plate, a piezoelectric element, and a connector connected configured to transmit a first force generated by a change of the curvature of the curved plate to the mount; and an actuator control circuit configured to control the voltage applied to the piezoelectric element of each of the actuator units based on movement information, so that the first force is transmitted from the actuator units to the mount against a second force acting on the mount due to the movement of the stage.