The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2021
Filed:
Mar. 25, 2020
Applicant:
Camtek Ltd., Migdal-Haemek, IL;
Inventor:
Daniel Buzaglo, Migdal Haemeq, IL;
Assignee:
CAMTEK LTD., Migdal-Haemek, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); G06T 9/00 (2006.01); G06T 15/00 (2011.01); G06N 3/02 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9505 (2013.01); G06N 3/02 (2013.01); G06T 9/002 (2013.01); G06T 15/005 (2013.01);
Abstract
There may be provided a method for determining three dimensional (3D) defect information, the method may include performing a two-dimensional (2D) inspection of an area of a wafer to generate 2D defect information related to defects of the area of the wafer; estimating 3D defect information regarding the defects of the area of the wafer, wherein the estimating is based on the 2D defect information related to defects of the area of the wafer, and a mapping between 2D defect information and 3D defect information, wherein the mapping is generated using a supervised deep learning machine process.