The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2021
Filed:
Feb. 19, 2020
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Andre Brockmeier, Villach, AT;
Roland Rupp, Lauf, DE;
Francisco Javier Santos Rodriguez, Villach, AT;
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/0015 (2013.01); B81B 3/0027 (2013.01); B81B 3/0097 (2013.01); B81C 1/00349 (2013.01); B81C 1/00357 (2013.01); B81B 2203/0118 (2013.01); B81C 2201/0192 (2013.01);
Abstract
In various embodiments, a method of processing a monocrystalline substrate is provided. The method may include severing the substrate along a main processing side into at least two monocrystalline substrate segments, and forming a micromechanical structure comprising at least one monocrystalline substrate segment of the at least two substrate segments.