The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2021
Filed:
Jan. 24, 2017
Applied Materials, Inc., Santa Clara, CA (US);
James D. Carducci, Sunnyvale, CA (US);
Kenneth S. Collins, San Jose, CA (US);
Kartik Ramaswamy, San Jose, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Richard Charles Fovell, San Jose, CA (US);
Vijay D. Parkhe, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A gas distribution plate assembly for a processing chamber is provided that in one embodiment includes a body made of a metallic material, a base plate comprising a silicon infiltrated metal matrix composite coupled to the body, and a perforated faceplate comprising a silicon disk coupled to the base plate by a bond layer.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile