The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 22, 2021

Filed:

Jan. 23, 2020
Applicant:

Applied Materials Israel Ltd., Rehovot, IL;

Inventor:

Pavel Margulis, Ashdod, IL;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/24 (2006.01); H01J 37/28 (2006.01); H01J 37/256 (2006.01);
U.S. Cl.
CPC ...
H01J 37/24 (2013.01); H01J 37/256 (2013.01); H01J 37/28 (2013.01);
Abstract

A supply unit for driving an electrode of a charged particle beam column, the supply unit includes a first amplifier and a second amplifier that are configured to receive an input signal, an output of the first amplifier is coupled, via the first resistor, to a signal line of the coaxial cable, an output of the second amplifier is coupled, via the second resistor, to a main shield of the coaxial cable, one port of the first amplifier and one port of the second amplifier are coupled to a power supply return port. The signal line is configured to provide a first driving signal to an that is coupled between the signal line and the power supply return port.


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