The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 22, 2021

Filed:

Feb. 19, 2018
Applicant:

Dai Nippon Printing Co., Ltd., Tokyo, JP;

Inventors:

Toshihiko Takeda, Tokyo, JP;

Katsunari Obata, Tokyo, JP;

Hiromitsu Ochiai, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/04 (2006.01); H01L 27/32 (2006.01); B23K 26/082 (2014.01); B23K 26/382 (2014.01); B23K 26/40 (2014.01); B23K 26/06 (2014.01); H01L 51/00 (2006.01); C23C 14/04 (2006.01); B05C 21/00 (2006.01); B23K 101/40 (2006.01); B23K 103/00 (2006.01); B23K 103/16 (2006.01);
U.S. Cl.
CPC ...
C23C 16/042 (2013.01); B05C 21/005 (2013.01); B23K 26/0604 (2013.01); B23K 26/0661 (2013.01); B23K 26/082 (2015.10); B23K 26/382 (2015.10); B23K 26/40 (2013.01); C23C 14/042 (2013.01); H01L 27/3211 (2013.01); H01L 51/0011 (2013.01); B23K 2101/40 (2018.08); B23K 2103/172 (2018.08); B23K 2103/50 (2018.08);
Abstract

There are provided a vapor deposition mask capable of satisfying both high definition and lightweight in upsizing and forming a vapor deposition pattern with high definition while securing strength, a method for producing a vapor deposition mask and a vapor deposition mask preparation body capable of simply producing the vapor deposition mask, and furthermore, a method for producing an organic semiconductor element capable of producing an organic semiconductor element with high definition. A metal maskin which a plurality of slitsare provided and a resin maskare stacked. Openingsrequired for composing a plurality of screens are provided in the resin mask. The openingscorrespond to a pattern to be produced by vapor deposition. Each of the slitsis provided at a position of overlapping with an entirety of at least one screen.


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