The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 15, 2021

Filed:

Jun. 22, 2017
Applicant:

Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai, CN;

Inventors:

Song Guo, Shanghai, CN;

Jianqi Sun, Shanghai, CN;

Feibiao Chen, Shanghai, CN;

Yuebin Zhu, Shanghai, CN;

Tianming Wang, Shanghai, CN;

Hai Xia, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 23/00 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 24/75 (2013.01); H01L 21/6773 (2013.01); H01L 21/67092 (2013.01); H01L 21/67144 (2013.01); H01L 21/67173 (2013.01); H01L 21/67178 (2013.01); H01L 21/67721 (2013.01); H01L 21/67736 (2013.01); H01L 21/68 (2013.01); H01L 21/68707 (2013.01); H01L 24/80 (2013.01); H01L 24/97 (2013.01); H01L 2224/7598 (2013.01);
Abstract

A chip bonding apparatus and method are disclosed. The chip bonding apparatus includes: at least one separation module for separating chips; at least one bonding module for bonding the chips a substrate; a transportation device for transporting the chips between the separation module and the bonding module, the transportation device including one or more guide tracks and one or more transportation carriers for retaining the chips, each of the guide tracks is provided thereon with at least one of the transportation carriers; and a control device for individually controlling the separation module, the bonding module and the transportation device. The chip bonding apparatus and method allows pickup, transportation and chip-to-substrate bonding of chips in batches with increased chip bonding yield and improved chip bonding accuracy.


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