The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 15, 2021

Filed:

Dec. 19, 2018
Applicant:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;

Inventors:

Takashi Nagamine, Kawasaki, JP;

Kazuishi Tanno, Incheon, KR;

Tsuyoshi Nakamura, Incheon, KR;

Masafumi Fujisaki, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/30 (2006.01); G03F 7/039 (2006.01); C07C 63/34 (2006.01); C07C 63/36 (2006.01); C07C 63/38 (2006.01); C07C 63/42 (2006.01); C07C 63/44 (2006.01); C07C 63/46 (2006.01); C07C 65/11 (2006.01); C07C 65/15 (2006.01); G03F 7/038 (2006.01); C07C 321/30 (2006.01); C07C 57/50 (2006.01); G03F 7/32 (2006.01); C07C 381/12 (2006.01); G03F 7/38 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 57/50 (2013.01); C07C 63/34 (2013.01); C07C 63/36 (2013.01); C07C 63/38 (2013.01); C07C 63/42 (2013.01); C07C 63/44 (2013.01); C07C 63/46 (2013.01); C07C 65/11 (2013.01); C07C 65/15 (2013.01); C07C 321/30 (2013.01); C07C 381/12 (2013.01); G03F 7/038 (2013.01); G03F 7/30 (2013.01); G03F 7/325 (2013.01); C07C 2603/24 (2017.05); C07C 2603/74 (2017.05); G03F 7/0397 (2013.01); G03F 7/38 (2013.01);
Abstract

A resist composition which generates an acid upon exposure and whose solubility in a developing solution is changed due to an action of the acid, the resist composition including a base material component whose solubility in a developing solution is changed due to the action of an acid; and a compound represented by Formula (d1) in which Rand Reach independently represents —COO, —COOH, or a hydroxyl group, where at least one of Rand Rrepresents —COO, R, R, and Reach independently represents a hydroxyl group or a halogen atom, Rto Reach independently represents an alkyl group, nbrepresents an integer of 0 to 4, nband nbeach independently represents an integer of 0 to 2, nbto nbeach independently represents an integer of 0 to 5, m represents 1 or 2, and q represents an integer of 0 to 3.)


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