The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2021
Filed:
Dec. 19, 2018
Applicant:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Inventors:
Assignee:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/039 (2006.01); C07C 309/06 (2006.01); C07C 309/12 (2006.01); C07C 309/19 (2006.01); C07J 9/00 (2006.01); G03F 7/20 (2006.01); C07J 31/00 (2006.01); C07J 19/00 (2006.01); C07J 43/00 (2006.01); G03F 7/038 (2006.01); C08L 33/14 (2006.01); C07C 309/04 (2006.01); C07C 303/32 (2006.01); G03F 7/30 (2006.01); C08G 61/04 (2006.01); G03F 7/38 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 303/32 (2013.01); C07C 309/04 (2013.01); C07C 309/06 (2013.01); C07C 309/12 (2013.01); C07C 309/19 (2013.01); C07J 19/00 (2013.01); C07J 31/006 (2013.01); C07J 43/003 (2013.01); C08L 33/14 (2013.01); G03F 7/0046 (2013.01); G03F 7/0382 (2013.01); G03F 7/0397 (2013.01); G03F 7/2041 (2013.01); G03F 7/30 (2013.01); C07J 9/005 (2013.01); C08G 61/04 (2013.01); G03F 7/38 (2013.01);
Abstract
A resist composition containing a compound (B1) represented by Formula (b1) in which Rrepresents a monovalent hydrocarbon group which has a steroid skeleton and 17 to 50 carbon atoms, Yand Yeach independently represent a divalent linking group having a hetero atom, Vrepresents a divalent linking group containing a cyclic aliphatic hydrocarbon group, Vrepresents an alkylene group, a fluorinated alkylene group, or a single bond, Rrepresents a hydrogen atom, a fluorine atom, or a fluorinated alkyl group having 1 to 5 carbon atoms, m represents an integer of 1 or greater, and Mrepresents an m-valent organic cation