The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 15, 2021

Filed:

Apr. 16, 2019
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventors:

Frank Klemm, Jena, DE;

Joerg Engel, Weida, DE;

Carsten Wehe, Weimar, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/00 (2006.01); G05B 13/00 (2006.01);
U.S. Cl.
CPC ...
G02B 21/0084 (2013.01); G02B 21/0048 (2013.01); G05B 13/00 (2013.01);
Abstract

The invention is based on the object of providing a particularly reliable closed-loop control for a scanner. According to various examples, this object is achieved by an analysis of a system deviation in the frequency space. By way of example, an input signal, which is indicative of a time dependence of the system deviation between an ACTUAL pose and a TARGET pose of a deflection unit of the scanner, can be expanded into a multiplicity of error components and a plurality of frequencies. Then, a corresponding correction signal component can be determined for each of the multiplicity of error components. By way of example, such techniques can be used in a laser scanning microscope.


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