The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 15, 2021

Filed:

Oct. 08, 2019
Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Jun Mochizuki, Nirasaki, JP;

Hiroaki Hayashi, Nirasaki, JP;

Kanji Suzuki, Nirasaki, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/04 (2006.01); G01R 1/067 (2006.01); G01R 1/073 (2006.01); G01R 31/27 (2006.01); G01R 1/20 (2006.01);
U.S. Cl.
CPC ...
G01R 1/0416 (2013.01); G01R 1/07342 (2013.01); G01R 1/20 (2013.01); G01R 31/275 (2013.01);
Abstract

There is provided an intermediate connection member provided between a first member having a plurality of first terminals and a second member having a plurality of second terminals to electrically connect the plurality of first terminals and the plurality of second terminals, respectively. The intermediate connection member includes: a block member including connection members configured to electrically connect the plurality of first terminals and the plurality of second terminals, respectively; a frame member having an insertion hole into which the block member is inserted; and an electronic component electrically connected to one of the connection members.


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