Thermal diffusion factor measurement device, thermal diffusion factor measurement method and program

Abstract

To provide a thermal diffusion factor measurement device, a thermal diffusion factor measurement method and a program capable of measuring thermal diffusion with high accuracy, even when an object to be measured has anisotropy in which thermal diffusion factors differ greatly between the in-plane direction and the thickness direction and a thick thickness. In a thermal diffusion factor measurement method, a heating location H on a tabular sample is made to generate periodically varying thermal waves and the thermal waves at a detection location S on the sample are detected by a non-contact temperature sensor. In addition, the phase delay of the thermal waves at the detection location S is detected in consideration of a detection sensitivity distribution DS of the non-contact temperature sensor and the thermal diffusion factor in the in-plane direction of the sample is measured using the phase delay.