The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2021
Filed:
Aug. 15, 2019
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Ozkan Ozturk, Round Rock, TX (US);
Seth J. Bamesberger, Austin, TX (US);
Masaki Saito, Austin, TX (US);
Alireza Aghili, Austin, TX (US);
Steven C. Shackleton, Austin, TX (US);
Byung-Jin Choi, Austin, TX (US);
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B28D 5/00 (2006.01); H01L 21/3105 (2006.01);
U.S. Cl.
CPC ...
B28D 5/0047 (2013.01); H01L 21/31058 (2013.01);
Abstract
A method is provided, comprising creating at least one crack at a point on an edge of a stack of at least a substrate and a superstrate; propagating the crack along the periphery; and moving the superstrate relative to the substrate to complete separation of the superstrate from the substrate.