The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2021
Filed:
Aug. 29, 2017
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 18/18 (2006.01); C23C 18/16 (2006.01); C23C 18/34 (2006.01); H01L 21/3065 (2006.01); H01L 21/033 (2006.01); H01L 21/3205 (2006.01);
U.S. Cl.
CPC ...
C23C 18/1893 (2013.01); C23C 18/16 (2013.01); C23C 18/1608 (2013.01); C23C 18/18 (2013.01); C23C 18/34 (2013.01); H01L 21/0332 (2013.01); H01L 21/0337 (2013.01); H01L 21/3065 (2013.01); H01L 21/3205 (2013.01);
Abstract
A substrate W having a non-plateable material portionand a plateable material portionformed on a surface thereof is prepared, and then, a catalyst is selectively imparted to the plateable material portionby performing a catalyst imparting processing on the substrate W. Thereafter, a plating layeris selectively formed on the plateable material portionby performing a plating processing on the substrate W. Before the imparting of the catalyst, an organic filmis formed on the substrate W by supplying an organic liquid Lonto the substrate W.