The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2021
Filed:
Jun. 28, 2012
Applicant:
Lutz Rebstock, Gaeinhofen, DE;
Inventor:
Lutz Rebstock, Gaeinhofen, DE;
Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); B25J 13/08 (2006.01); B25J 9/16 (2006.01); B65B 5/08 (2006.01); B65B 31/04 (2006.01); B65B 35/16 (2006.01); B65B 63/08 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67393 (2013.01); B25J 9/1679 (2013.01); B25J 13/087 (2013.01); B65B 5/08 (2013.01); B65B 31/04 (2013.01); B65B 35/16 (2013.01); B65B 63/08 (2013.01); H01L 21/67766 (2013.01); H01L 21/67769 (2013.01); H01L 21/67778 (2013.01); Y10T 74/20305 (2015.01);
Abstract
Processes and systems for cleaned storage of high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber cleans the stored workpieces. A purge gas system prevents contamination of the articles stored within the workpieces. A robot detects the condition of the storage compartment before delivering the workpiece. A monitor device monitors the conditions of the stocker.