The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2021
Filed:
May. 14, 2018
Asml Netherlands B.v., Veldhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Patricius Aloysius Jacobus Tinnemans, Hapert, NL;
Haico Victor Kok, Veldhoven, NL;
William Peter Van Drent, Best, NL;
Sebastianus Adrianus Goorden, Eindhoven, NL;
ASML Netherlands B.V, Veldhoven, NL;
Abstract
The invention relates to a sensor comprising: a radiation source to emit radiation having a coherence length towards a sensor target; and a polarizing beam splitter to split radiation diffracted by the sensor target into radiation with a first polarization state and radiation with a second polarization state, wherein the first polarization state is orthogonal to the second polarization state, and wherein the sensor is configured such that after passing the polarizing beam splitter radiation with the first polarization state has an optical path difference relative to radiation with the second polarization state that is larger than the coherence length.