The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2021
Filed:
Apr. 28, 2018
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Dirk Heinrich Ehm, Beckingen, DE;
Stefan-Wolfgang Schmidt, Aalen, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
An optical assembly includes an optical element (), configured in particular for the reflection of EUV radiation (), and a protective element () for protecting a surface () of the optical element () from contaminating substances (P). The protective element () has a membrane (-) and a frame () on which the membrane (-) is mounted. The membrane is formed by a plurality of membrane segments () which respectively protect a partial region (T) of the surface () of the optical element () from the contaminating substances (P). The optical assembly can form part of an overall optical arrangement, for example an EUV lithography system.