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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11022566 B1

PDFFull Text
Date of Patent:
Jun. 01, 2021

Filed:

Mar. 31, 2020

Examination of a semiconductor specimen

Applicant:

Applied Materials Israel Ltd., Rehovot, IL;

Inventors:

Dror Alumot, Tel Aviv, IL;

Shalom Elkayam, Ramla, IL;

Shaul Cohen, Irus, IL;

Assignee:

APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;

Attorney:

Lowenstein Sandler LLP

Primary Examiner:

Suresh Memula

Int. Cl.
CPC ...
G01N 21/95 (2006.01); G06F 30/3308 (2020.01); G06F 30/398 (2020.01); H01L 21/67 (2006.01); G06T 7/13 (2017.01); G06T 7/136 (2017.01); G06T 7/00 (2017.01); G06F 119/02 (2020.01);
U.S. Cl.
CPC ...
G01N 21/9503 (2013.01); G06F 30/3308 (2020.01); G06F 30/398 (2020.01); G06T 7/0006 (2013.01); G06T 7/13 (2017.01); G06T 7/136 (2017.01); H01L 21/67288 (2013.01); G06F 2119/02 (2020.01); G06T 2207/20081 (2013.01); G06T 2207/30148 (2013.01);
Abstract

There is provided a system and method of examination of a semiconductor specimen using an examination recipe. The method includes obtaining a registered image pair, for each design-based structural element associated with a given layer, calculating an edge attribute, using a trained classifier to determine a class of the design-based structural element, and generating a layer score usable to determine validity of the registered image pair. There is also provided a system and method of generating the examination recipe usable for examination of a semiconductor specimen.

Find Patent Forward Citations

Alumot, Dror. (2021). Examination of a semiconductor specimen (U.S. Patent No. 11022566). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11022566

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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