The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 25, 2021

Filed:

Nov. 29, 2019
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Un-Byoung Kang, Hwaseong-si, KR;

Tae-Je Cho, Yongin-si, KR;

Hyuek-Jae Lee, Hwaseong-si, KR;

Cha-Jea Jo, Yongin-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05K 1/11 (2006.01); H05K 1/18 (2006.01); H01L 21/48 (2006.01); H05K 3/46 (2006.01); C23C 18/00 (2006.01); H01L 23/433 (2006.01); H01L 23/498 (2006.01); B05D 1/00 (2006.01); B05D 1/32 (2006.01); B05D 1/38 (2006.01); B05D 3/02 (2006.01); B05D 7/00 (2006.01); C23C 14/02 (2006.01); C23C 14/04 (2006.01); C23C 14/06 (2006.01); C23C 14/20 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); C23C 18/38 (2006.01); H01L 23/00 (2006.01); H01L 25/03 (2006.01); H01L 23/473 (2006.01); H01L 23/538 (2006.01); H01L 25/065 (2006.01); H05K 1/14 (2006.01);
U.S. Cl.
CPC ...
H01L 21/4857 (2013.01); B05D 1/005 (2013.01); B05D 1/32 (2013.01); B05D 1/38 (2013.01); B05D 3/0209 (2013.01); B05D 7/546 (2013.01); C23C 14/024 (2013.01); C23C 14/046 (2013.01); C23C 14/0641 (2013.01); C23C 14/205 (2013.01); C23C 14/34 (2013.01); C23C 14/588 (2013.01); C23C 18/00 (2013.01); H01L 21/486 (2013.01); H01L 23/4334 (2013.01); H01L 23/49822 (2013.01); H05K 1/181 (2013.01); H05K 3/465 (2013.01); H05K 3/4682 (2013.01); C23C 18/38 (2013.01); H01L 23/473 (2013.01); H01L 23/5385 (2013.01); H01L 24/13 (2013.01); H01L 24/16 (2013.01); H01L 24/73 (2013.01); H01L 24/81 (2013.01); H01L 25/03 (2013.01); H01L 25/0655 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/13111 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/73253 (2013.01); H01L 2224/81005 (2013.01); H01L 2224/97 (2013.01); H01L 2924/1431 (2013.01); H01L 2924/1434 (2013.01); H01L 2924/1437 (2013.01); H01L 2924/15311 (2013.01); H01L 2924/18161 (2013.01); H05K 1/11 (2013.01); H05K 1/144 (2013.01); H05K 2201/10378 (2013.01); H05K 2203/025 (2013.01); H05K 2203/0588 (2013.01);
Abstract

A semiconductor package includes: a plurality of unit redistribution layers vertically stacked, each including: a first polymer layer having a first via hole pattern; a second polymer layer formed on the first polymer layer, and having a redistribution pattern on the first polymer layer and a second via hole pattern in the first via hole pattern; a seed layer covering sidewalls and bottom surfaces of the redistribution pattern and the second via hole pattern; a conductive via plug formed in the second via hole pattern; and a conductive redistribution line formed in the redistribution pattern; a connection terminal disposed on a bottom surface of a lowermost unit redistribution layer and electrically connected to the conductive via plug; a semiconductor device mounted on the unit redistribution layers with a conductive terminal interposed therebetween. Upper surfaces of the second polymer layer, the conductive redistribution line and the conductive via plug are substantially coplanar.


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