The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2021
Filed:
Nov. 27, 2019
Jeroen Van Duivenbode, Veldhoven, NL;
Petrus Jacobus Maria Van Gils, Berkel-Enschot, NL;
Petrus Johannes Van Den Oever, Eindhoven, NL;
Coen Hubertus Matheus Baltis, Eindhoven, NL;
Jeroen Van Duivenbode, Veldhoven, NL;
Petrus Jacobus Maria Van Gils, Berkel-Enschot, NL;
Petrus Johannes Van Den Oever, Eindhoven, NL;
Coen Hubertus Matheus Baltis, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An apparatus for removing particles from a clamp, the apparatus being arrangeable in proximity of the clamp and comprising an insulating portion, a supporting portion, at least a part or all of the insulating portion being arranged on the supporting portion, wherein the supporting portion is configured such that when a voltage is applied to the supporting portion of the apparatus and/or to an electrode of the clamp, the supporting portion acts as an electrode to allow an electric field to be generated between the apparatus and the clamp for removal of the particles from the clamp.