The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2021
Filed:
Jul. 25, 2017
Tokyo Electron Limited, Tokyo, JP;
Minoru Uchida, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
The inspection systemis constructed by assembling inspection modulesconfigured to inspect inspection target objects and a transfer moduleconfigured to transfer the inspection target object to the corresponding inspection module. The inspection systemis configured to transfer the inspection target objects into the inspection modules by the transfer module and inspect the inspection target objects in sequence. The adjustment method of the inspection system includes preparing an auxiliary element having a preset function of the inspection moduleor a preset function of the transfer module; and adjusting, with respect to an adjustment which needs to be performed after the inspection system is constructed, the transfer module, or each of the inspection modulesor the inspection modulesas a single system by connecting the auxiliary element() to the transfer moduleor the inspection module
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile