The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2021
Filed:
Oct. 30, 2015
Applicant:
Fujimi Incorporated, Kiyosu, JP;
Inventors:
Shuhei Takahashi, Kiyosu, JP;
Masatoshi Tomatsu, Kiyosu, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09K 3/14 (2006.01); C09G 1/02 (2006.01); H01L 21/02 (2006.01); B24B 37/04 (2012.01); H01L 21/304 (2006.01); B24B 1/00 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
C09K 3/1409 (2013.01); B24B 1/00 (2013.01); B24B 37/042 (2013.01); B24B 37/044 (2013.01); C09G 1/02 (2013.01); C09K 3/1463 (2013.01); H01L 21/02024 (2013.01); H01L 21/304 (2013.01); H01L 29/1608 (2013.01);
Abstract
The present invention provides a polishing composition for use in polishing a material having a Vickers hardness of 1500 Hv or higher. The polishing composition has an oxidation-reduction potential ORPmV and the material to be polishing has an oxidation-reduction potential ORPmV, with their relation satisfying ORP−ORP≥100 mV.