The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 18, 2021

Filed:

Dec. 06, 2019
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Jung-han Lee, Anyang-si, KR;

Sun-ghil Lee, Hwaseong-si, KR;

Myung-il Kang, Yongin-si, KR;

Jeong-yun Lee, Yongin-si, KR;

Seung-hun Lee, Hwaseong-si, KR;

Hyun-jung Lee, Suwon-si, KR;

Sun-wook Kim, Seongnam-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/088 (2006.01); H01L 27/11 (2006.01); H01L 29/06 (2006.01); H01L 27/02 (2006.01); H01L 21/8234 (2006.01); H01L 27/092 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0886 (2013.01); H01L 21/823418 (2013.01); H01L 27/0207 (2013.01); H01L 27/0924 (2013.01); H01L 27/1104 (2013.01); H01L 27/1116 (2013.01); H01L 29/0649 (2013.01); H01L 29/66545 (2013.01);
Abstract

An integrated circuit (IC) device includes a first and a second fin-type active region protruding from a first region and a second region, respectively, of a substrate, a first and a second gate line, and a first and a second source/drain region. The first fin-type active region has a first top surface and a first recess has a first depth from the first top surface. The first source/drain region fills the first recess and has a first width. The second fin-type active region has a second top surface and a second recess has a second depth from the second top surface. The second depth is greater than the first depth. The second source/drain region fills the second recess and has a second width. The second width is greater than the first width.


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