The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 18, 2021

Filed:

Feb. 11, 2020
Applicants:

Hitachi, Ltd., Tokyo, JP;

Riken, Wako, JP;

Inventors:

Toshiaki Tanigaki, Tokyo, JP;

Tetsuya Akashi, Tokyo, JP;

Ken Harada, Wako, JP;

Assignees:

HITACHI, LTD., Tokyo, JP;

RIKEN, Saitama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/141 (2006.01); H01J 37/26 (2006.01); H01J 37/09 (2006.01); H01J 37/147 (2006.01); H01J 37/295 (2006.01);
U.S. Cl.
CPC ...
H01J 37/141 (2013.01); H01J 37/09 (2013.01); H01J 37/147 (2013.01); H01J 37/261 (2013.01); H01J 37/295 (2013.01);
Abstract

An interferometric electron microscope with increased irradiating electric current density which causes electron waves to interfere with each other and includes: an electron source; an irradiating lens system a focusing lens system an observational plane an artificial grating disposed between the electron source and the irradiating lens system and diffracting the electron beam emitted from the electron source to produce a first electron wave and a second electron wave; an electron beam biprism deflecting the first electron wave and the second electron wave to pass the first electron wave through the specimen for use as an object wave and to use the second electron wave as a reference wave; and an electron beam biprism in a focusing system deflecting the objective wave and the reference wave to superimpose the objective wave and the reference wave on the observational plane to produce an image.


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