The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2021
Filed:
Feb. 08, 2018
Tokyo Electron Limited, Tokyo, JP;
Shin Uchida, Yamanashi, JP;
Tetsuya Kagami, Yamanashi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
An inspection system is provided with a prober and a tester. The tester includes a plurality of tester module boards on which a plurality of LSIs respectively corresponding to a plurality of devices under test (DUT) are mounted; a display unit which displays a wafer map indicating inspection results of the plurality of DUTs and/or self-diagnosis results of the tester; and a tester control unit which includes a wafer map drawing application for drawing the wafer map displayed on the display unit. The wafer map drawing application causes the inspection results and/or the self-diagnosis results to be displayed for each of the plurality of DUTs in a stepwise manner. In the wafer map, the plurality of DUTs are respectively linked to correspond to the plurality of LSIs mounted on the plurality of tester module boards.